MIME 570 Micro- and Nano-Fabrication Fundamentals
3 credits · Mining & Materials Engineering · Faculty of Engineering · Not scheduled for 2026–2027
Fundamentals of micro- and nano-fabrication technologies. Lithographic, etching, deposition, and implantation and various control parameters of these processes and their resulting effects on structure, materials quality, and conformality.
Prerequisites
MIME 467 or ECSE 330 or equivalent, or permission of instructor
Prerequisite courses: ECSE 330, MIME 467
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