MECH 553 Design and Manufacture of Microdevices

3 credits · Mechanical Engineering · Faculty of Engineering · Not scheduled for 2026–2027

Introduction to microelectromechanical systems (MEMS). Micromachining techniques (thin-film deposition; lithography; etching; bonding). Microscale mechanical behaviour (deformation and fracture; residual stresses; adhesion; experimental techniques). Materials- and process-selection. Process integrat…

Prerequisite courses: MECH 309, MECH 315, MECH 321, MECH 419

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