CHEE 543 Plasma Engineering

3 credits · Chemical Engineering · Faculty of Engineering · Not scheduled for 2026–2027

Description of the plasma state and parameters, plasma generation methods, and of the related process control and instrumentation. Electrical breakdown in gases and a series of discharge models are covered. Plasma processing applications such as PVD, PECVD, plasma polymerisation and etching, environ…

Prerequisite courses: CHEE 220, CHEE 314

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